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4\u7ebf\u30018\u7ebf\u300116 \u7ebf\u300132 \u7ebf\u548c 64 \u7ebf\u3002\u4f46\u4ef7\u683c\u9ad8\u6602\uff0c\u5927\u591a\u8f66\u4f01\u4e0d\u4f1a\u9009\u7528\u3002<\/p>\n\n\n\n<p><strong>\u6309\u626b\u63cf\u65b9\u5f0f\u5206\u7c7b<\/strong><strong><\/strong><\/p>\n\n\n\n<p><strong>MEMS\u578b\u6fc0\u5149\u96f7\u8fbe<\/strong><strong><\/strong><\/p>\n\n\n\n<p>MEMS 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